SEMIE5-0301协议_semi协议资源-CSDN文库资源-CSDN文库

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SEMI E5-0301 协议 SEMI E5-0301 协议是半导体行业专用的设备通信标准，旨在提供半导体设备之间的通讯协议，以实现设备之间的数据交换和控制。该标准于 1982 年首次发布，2000 年和 2001 年进行了更新。 1. Introduction SEMI E5-0301 协议的目的是提供半导体设备之间的通讯标准，以实现设备之间的数据交换和控制。该标准主要应用于半导体行业，旨在提高设备之间的通讯效率和可靠性。 2. Selected Definitions 在 SEMI E5-0301 协议中，定义了一些关键术语，例如： * Message：指设备之间传输的数据单元。 * Stream：指设备之间的通讯通道。 * Function：指设备之间的功能调用。 3. The Message Transfer Protocol SEMI E5-0301 协议定义了一个消息传输协议（Message Transfer Protocol），用于设备之间的数据交换。该协议包括以下几部分： * Message Header：消息头部，包含消息的基本信息。 * Transaction Timeout：消息超时机制，用于控制消息的传输时间。 * Blocking Requirements：阻塞要求，用于控制设备之间的阻塞情况。 4. Streams and Functions SEMI E5-0301 协议定义了多个流（Stream）和函数（Function），用于设备之间的通讯。流和函数的分配是根据设备的功能和需求进行的。 5. Transaction and Conversation Protocols SEMI E5-0301 协议定义了事务协议（Transaction Protocol）和对话协议（Conversation Protocol），用于设备之间的数据交换和控制。事务协议定义了设备之间的数据交换规则，而对话协议定义了设备之间的对话规则。 6. Data Structures SEMI E5-0301 协议定义了多种数据结构，例如： * Item：单个数据项。 * List：数据列表。 * Localized Character String Items：本地化字符串项目。 * Example Data Structures：示例数据结构。 7. Message Detail SEMI E5-0301 协议定义了多种消息细节，例如： * Stream 0 and Function 0：流 0 和函数 0。 * Stream 1 Equipment Status：流 1 设备状态。 * S1,F0 Abort Transaction (S1F0)：流 1，函数 0 中止事务。 SEMI E5-0301 协议是半导体行业专用的设备通信标准，旨在提供半导体设备之间的通讯协议，以实现设备之间的数据交换和控制。该标准定义了多种协议和数据结构，用于设备之间的通讯和控制。

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SEMI E5-0301 © SEMI 1982, 20011

SEMI E5-0301

SEMI EQUIPMENT COMMUNICATIONS STANDARD 2 MESSAGE

CONTENT (SECS-II)

This standard was technically approved by the Global Information & Control Committee and is the direct

responsibility of the North American Information & Control Committee. Current changes approved by the

Japanese Regional Standards Committee on December 1, 2000. Initially available at www.semi.org January

2001; to be published March 2001. Originally published in 1982; previously published October 2000.

NOTICE: The user’s attention is called to the

possibility that some implementations of this standard,

particularly those related to the use of Stream 4, may

involve the use of inventions covered by U.S. patents

4,884,674 and 5,216,613, and by other patents issued or

pending, held by Texas Instruments Incorporated. By

publication of this standard, SEMI takes no position

respecting either the applicability or the validity of

these or other patent rights asserted in connection with

any item mentioned in this standard. Users of this

standard are expressly advised that determination of

any such patent rights, and the risk of infringement of

such rights, are entirely their own responsibility.

CONTENTS

1 Introduction

1.1 Intent

1.2 Overview

1.3 Application

1.4 Applicable Documents

2 Selected Definitions

3 The Message Transfer Protocol

3.1 Intent

3.2 Messages

3.2 Blocking Requirements

3.2 Message Header

3.2 The Transaction Timeout

3.2 Multiple Open Transaction

4 Streams and Functions

4.1 Streams

4.2 Functions

4.3 Stream and Function Allocation

5 Transaction and Conversation Protocols

5.1 Intent

5.2 Transaction Definition

5.3 Transaction Level Requirements

5.4 Conversation Protocols

6 Data Structures

6.1 Intent

6.2 Item

6.3 List

6.4 Localized Character String Items

6.5 Example Data Structures

6.6 Data Item Dictionary

6.7 Variable Item Dictionary

6.8 Object Dictionary

7 Message Detail

7.1 Intent

7.4 Stream 0 and Function 0

7.5 Stream 1 Equipment Status

S1,F0 Abort Transaction (S1F0)

S1,F1 Are You There Request (R)

S1,F2 On Line Data (D)

S1,F3 Selected Equipment Status Request

(SSR)

S1,F4 Selected Equipment Status Data (SSD)

S1,F5 Formatted Status Request (FSR)

S1,F6 Formatted Status Data (FSD)

S1,F7 Fixed Form Request (FFR)

S1,F8 Fixed Form Data (FFD)

S1,F9 Material Transfer Status Request (TSR)

S1,F10 Material Transfer Status Data (TSD)

S1,F11 Status Variable NameList Request

(SVNR)

S1,F12 Status Variable NameList Reply

(SVNRR)

S1,F13 Establish Communications Request (CR)

S1,F14 Establish Communications Request

Acknowledge (CRA)

S1,F15 Request OFF-LINE (ROFL)

S1,F16 OFF-LINE Acknowledge (OFLA)

S1,F17 Request ON-LINE (RONL)

S1,F18 ON-LINE Acknowledge (ONLA)

Macro Level Messages

S1,F19 Get Attribute (GA)

S1,F20 Attribute Data (AD)

7.6 Stream 2 Equipment Control and Diagnostics

S2,F0 Abort Transaction (S2F0)

S2,F1 Service Program Load Inquire (SPI)

S2,F2 Service Program Load Grant (SPG)

S2,F3 Service Program Send (SPS)

S2,F4 Service Program Send Acknowledge

(SPA)

S2,F5 Service Program Load Request (SPR)

SEMI E5-0301 © SEMI 1982, 2001 2

S2,F6 Service Program Load Data (SPD)

S2,F7 Service Program Run Send (CSS)

S2,F8 Service Program Run Acknowledge

(CSA)

S2,F9 Service Program Results Request (SRR)

S2,F10 Service Program Results Data (SRD)

S2,F11 Service Program Directory Request

(SDR)

S2,F12 Service Program Directory Data (SDD)

S2,F13 Equipment Constant Request (ECR)

S2,F14 Equipment Constant Data (ECD)

S2,F15 New Equipment Constant Send (ECS)

S2,F16 New Equipment Constant Acknowledge

(ECA)

S2,F17 Date and Time Request (DTR)

S2,F18 Date and Time Data (DTD)

S2,F19 Reset/Initialize Send (RIS)

S2,F20 Reset Acknowledge (RIA)

S2,F21 Remote Command Send (RCS)

S2,F22 Remote Command Acknowledge (RCA)

S2,F23 Trace Initialize Send (TIS)

S2,F24 Trace Initialize Acknowledge (TIA)

S2,F25 Loopback Diagnostic Request (LDR)

S2,F26 Loopback Diagnostic Data (LDD)

S2,F27 Initiate Processing Request (IPR)

S2,F28 Initiate Processing Acknowledge (IPA)

S2,F29 Equipment Constant Namelist Request

(ECNR)

S2,F30 Equipment Constant Namelist (ECN)

S2,F31 Date and Time Set Request (DTS)

S2,F32 Date and Time Set Acknowledge (DTA)

S2,F33 Define Report (DR)

S2,F34 Define Report Acknowledge (DRA)

S2,F35 Link Event Report (LER)

S2,F36 Link Event Report Acknowledge

(LERA)

S2,F37 Enable/Disable Event Report (EDER)

S2,F38 Enable/Disable Event Report

Acknowledge (EERA)

S2,F39 Multi-block Inquire (DMBI)

S2,F40 Multi-block Grant (DMBG)

S2,F41 Host Command Send (HCS)

S2,F42 Host Command Acknowledge (HCA)

S2,F43 Reset Spooling Streams and Functions

(RSSF)

S2,F44 Reset Spooling Acknowledge (RSA)

S2,F45 Define Variable Limit Attributes

(DVLA)

S2,F46 Variable Limit Attribute Acknowledge

(VLAA)

S2,F47 Variable Limit Attribute Request

(VLAR)

S2,F48 Variable Limit Attribute Send (VLAS)

S2,F49 Enhanced Remote Command

S2,F50 Enhanced Remote Command

Acknowledge

7.7 Stream 3 Material Status

S3,F0 Abort Transaction (S3F0)

S3,F1 Material Status Request (MSR)

S3,F2 Material Status Data (MSD)

S3,F3 Time to Completion Request (TCR)

S3,F4 Time to Completion Data (TCD)

S3,F5 Material Found Send (MFS)

S3,F6 Material Found Acknowledge (MFA)

S3,F7 Material Lost Send (MLS)

S3,F8 Material Lost Acknowledge (MLA)

S3,F9 Material ID Equate Send (IES)

S3,F10 Material ID Equate Acknowledge (IEA)

S3,F11 Material ID Request (MIDR)

S3,F12 Material ID Request Acknowledge

(MIRA)

S3,F13 Material ID Send (MIS)

S3,F14 Material ID Acknowledge (MIA)

S3,F15 Materials Multi-Block Inquire (MMBI)

S3,F16 Materials Multi-Block Grant (MMBG)

S3,F17 Carrier Action Request

S3,F18 Carrier Action Acknowledge

S3,F19 Cancel All Carrier Out Request

S3,F20 Cancel All Carrier Out Acknowledge

S3,F21 Port Group Definition

S3,F22 Port Group Definition Acknowledge

S3,F23 Port Group Action Request

S3,F24 Port Group Action Acknowledge

S3,F25 Port Action Request

S3,F26 Port Action Acknowledge

7.8 Stream 4 Material Control

S4,F0 Abort Transaction (S4F0)

S4,F1 Ready to Send Material (RSN)

S4,F2 Ready to Send Acknowledge (RSA)

S4,F3 Send Material (SMN)

S4,F4 Not Used

S4,F5 Handshake Complete (HCN)

S4,F6 Not Used

S4,F7 Not Ready to Send (ABN)

S4,F8 Not Used

S4,F9 Stuck in Sender (SSN)

S4,F10 Not Used

S4,F11 Stuck in Receiver (SRN)

S4,F12 Not Used

S4,F13 Send Incomplete Timeout (SIN)

S4,F14 Not Used

S4,F15 Material Received (MRN)

S4,F16 Not Used

S4,F17 Request to Receive (RTR)

S4,F18 Request to Receive Acknowledge (RRA)

Macro Level Messages

S4,F19 Transfer Job Create (TJ)

S4,F20 Transfer Job Acknowledge (TJA)

S4,F21 Transfer Job Command (TJC)

S4,F22 Transfer Command Acknowledge (TCA)

S4,F23 Transfer Job Alert (TJA)

SEMI E5-0301 © SEMI 1982, 20013

S4,F24 Transfer Alert Acknowledge (TLA)

S4,F25 Multi-Block Inquire (MBI4)

S4,F26 Multi-Block Grant (MBG4)

Micro Level Messages

S4,F27 Handoff Ready (HR)

S4,F28 Not Used

S4,F29 Handoff Command (HC)

S4,F30 Not Used

S4,F31 Handoff Command Complete (HCC)

S4,F32 Not Used

S4,F33 Handoff Verify (HV)

S4,F34 Not Used

S4,F35 Handoff Cancel Ready (HCR)

S4,F36 Not Used

S4,F37 Handoff Cancel Ready Acknowledge

(HCA)

S4,F38 Not Used

S4,F39 Handoff Halt (HH)

S4,F40 Not Used

S4,F41 Handoff Halt Acknowledge (HHA)

S4,F42 Not Used

7.9 Stream 5 Exception Handling

S5,F0 Abort Transaction (S5F0)

S5,F1 Alarm Report Send (ARS)

S5,F2 Alarm Report Acknowledge (ARA)

S5,F3 Enable/Disable Alarm Send (EAS)

S5,F4 Enable/Disable Alarm Acknowledge

(EAA)

S5,F5 List Alarms Request (LAR)

S5,F6 List Alarm Data (LAD)

S5,F7 List Enabled Alarm Request (LEAR)

S5,F8 List Enabled Alarm Data (LEAD)

S5,F9 Exception Post Notify (EXPN)

S5,F10 Exception Post Confirm (EXPC)

S5,F11 Exception Clear Notify (EXCN)

S5,F12 Exception Clear Confirm (EXCC)

S5,F13 Exception Recover Request (EXRR)

S5,F14 Exception Recover Acknowledge

(EXRA)

S5,F15 Exception Recovery Complete Notify

(EXRCN)

S5,F16 Exception Recovery Complete Confirm

(EXRCC)

S5,F17 Exception Recovery Abort Request

(EXRAR)

S5,F18 Exception Recovery Abort Acknowledge

(EXRAA)

7.10 Stream 6 Data Collection

S6,F0 Abort Transaction (S6F0)

S6,F1 Trace Data Send (TDS)

S6,F2 Trace Data Acknowledge (TDA)

S6,F3 Discrete Variable Data Send (DVS)

S6,F4 Discrete Variable Data Acknowledge

(DVA)

S6,F5 Multi-block Data Send Inquire (MBI)

S6,F6 Multi-block Grant (MBG)

S6,F7 Data Transfer Request (DDR)

S6,F8 Data Transfer Data (DDD)

S6,F9 Formatted Variable Send (FVS)

S6,F10 Formatted Variable Acknowledge (FVA)

S6,F11 Event Report Send (ERS)

S6,F12 Event Report Acknowledge (ERA)

S6,F13 Annotated Event Report Send (AERS)

S6,F14 Annotated Event Report Acknowledge

(AERA)

S6,F15 Event Report Request (ERR)

S6,F16 Event Report Data (ERD)

S6,F17 Annotated Event Report Request

(AERR)

S6,F18 Annotated Event Report Data (AERD)

S6,F19 Individual Report Request (IRR)

S6,F20 Individual Report Data (IRD)

S6,F21 Annotated Individual Report (AIR)

S6,F22 Annotated Individual Report Data

(AIRD)

S6,F23 Request Spooled Data (RSD)

S6,F24 Request Spooled Data

Acknowledgement Send (RSDAS)

S6,F25 Notification Report Send

S6,F26 Notification Report Send Acknowledge

S6,F27 Trace Report Send (TRS)

S6,F28 Trace Report Send Acknowledge

(TRSA)

S6,F29 Trace Report Request (TRR)

S6,F30 Trace Report Data (TRD)

7.11 Stream 7 Process Program Management

S7,F0 Abort Transaction (S7F0)

S7,F1 Process Program Load Inquire (PPI)

S7,F2 Process Program Load Grant (PPG)

S7,F3 Process Program Send (PPS)

S7,F4 Process Program Acknowledge (PPA)

S7,F5 Process Program Request (PPR)

S7,F6 Process Program Data (PPD)

S7,F7 Process Program ID Request (PIR)

S7,F8 Process Program ID Data (PID)

S7,F9 M/P M Request (MMR)

S7,F10 M/P M Data (MMD)

S7,F11 M/P M Update Send (UMS)

S7,F12 M/P M Update Acknowledge (UMA)

S7,F13 Delete M/P M Entry Send (DES)

S7,F14 Delete M/P M Entry Acknowledge

(DEA)

S7,F15 Matrix Mode Select Send (MMS)

S7,F16 Matrix Mode Select Acknowledge

(MMA)

S7,F17 Delete Process Program Send (DPS)

S7,F18 Delete Process Program Acknowledge

(DPA)

S7,F19 Current EPPD Request (RER)

SEMI E5-0301 © SEMI 1982, 2001 4

S7,F20 Current EPPD Data (RED)

S7,F21 Equipment Process Capabilities Request

(PCR)

S7,F22 Equipment Process Capabilities Data

(PCD)

S7,F23 Formatted Process Program Send (FPS)

S7,F24 Formatted Process Program

Acknowledge (FPA)

S7,F25 Formatted Process Program Request

(FPR)

S7,F26 Formatted Process Program Data (FPD)

S7,F27 Process Program Verification Send

(PVS)

S7,F28 Process Program Verification

Acknowledge (PVA)

S7,F29 Process program Verification Inquire

(PVI)

S7,F30 Process Program Verification Grant

(PVG)

S7,F31 Verification Request Send (VRS)

S7,F32 Verification Request Acknowledge

(VRA)

S7,F33 Process Program Available Request

(PAR)

S7,F34 Process Program Availability Data

(PAD)

S7,F35 Process Program for MID Request

(PPMR)

S7,F36 Process Program for MID Data (PPMD)

7.12 Stream 8 Control Program Transfer

S8,F0 Abort Transaction (S8F0)

S8,F1 Boot Program Request (BPR)

S8,F2 Boot Program Data (BPD)

S8,F3 Executive Program Request (EPR)

S8,F4 Executive Program Data (EPD)

7.13 Stream 9 System Errors

S9,F0 Abort Transaction (S9F0)

S9,F1 Unrecognized Device ID (UDN)

S9,F2 Not Used

S9,F3 Unrecognized Stream Type (USN)

S9,F4 Not Used

S9,F5 Unrecognized Function Type (UFN)

S9,F6 Not Used

S9,F7 Illegal Data (IDN)

S9,F8 Not Used

S9,F9 Transaction Timer Timeout (TTN)

S9,F10 Not Used

S9,F11 Data Too Long (DLN)

S9,F12 Not Used

S9,F13 Conversation Timeout (CTN)

S9,F14 Not Used

7.14 Stream 10 Terminal Services

S10,F0 Abort Transaction (S10F0)

S10,F1 Terminal Request (TRN)

S10,F2 Terminal Request Acknowledge (TRA)

S10,F3 Terminal Display, Single (VTN)

S10,F4 Terminal Display, Single Acknowledge

(VTA)

S10,F5 Terminal Display, Multi-block (VTN)

S10,F6 Terminal Display, Multi-block

Acknowledge (VMA)

S10,F7 Multi-block Not Allowed (MNN)

S10,F8 Not Used

S10,F9 Broadcast (BCN)

S10,F10 Broadcast Acknowledge (BCA)

7.15 Stream 11 Host File Services (Deleted)

7.16 Stream 12 Wafer Mapping

S12,F0 Abort Transaction (S12F0)

S12,F1 Map Set-Up Data Send (MSDS)

S12,F2 Map Set-up Data Acknowledge

(MSDA)

S12,F3 Map Set-up Data Request (MSDR)

S12,F4 Map Set-up Data (MSD)

S12,F5 Map Transmit Inquire (MAPTI)

S12,F6 Map Transmit Grant (MAPTG)

S12,F7 Map Data Send Type 1 (MDS1)

S12,F8 Map Data Acknowledge Type 1

(MDA1)

S12,F9 Map Data Send Type 2 (MDS2)

S12,F10 Map Data Acknowledge Type 2

(MDA2)

S12,F11 Map Data Send Type 3 (MDS3)

S12,F12 Map Data Acknowledge 3 (MDA3)

S12,F13 Map Data Request Type 1 (MDR1)

S12,F14 Map Data Type 1 (MD1)

S12,F15 Map Data Request Type 2 (MDR2)

S12,F16 Map Data Type 2 (MD2)

S12,F17 Map Data Request Type 3 (MDR3)

S12,F18 Map Data Type 3 (MD3)

S12,F19 Map Error Report Send (MERS)

S12,F20 Not Used

7.17 Stream 13 Data Set Transfers

S13,F0 Abort Transaction (S13F0)

S13,F1 Send Data Set Send (DSSS)

S13,F2 Send Data Set Acknowledge (DSSA)

S13,F3 Open Data Set Request (DSOR)

S13,F4 Open Data Set Data (DSOD)

S13,F5 Read Data Set Request (DSRR)

S13,F6 Read Data Set Data (DSRD)

S13,F7 Close Data Set Send (DSCS)

S13,F8 Close Data Set Acknowledge (DSCA)

S13,F9 Reset Data Set Send (DSRS)

S13,F10 Reset Data Set Acknowledge (DSRA)

S13,F11 Data Set Object Multi-Block Inquire

(DSOMGI)

S13,F12 Data Set Object Multi-Block Grant

(DSOMBG)

S13,F13 Table Data Send (TDS)

S13,F14 Table Data Acknowledge (TDA)

S13,F15 Table Data Request (TDR)

S13,F16 Table Data (TD)

7.18 Stream 14 Object Services

S14,F0 Abort Transaction (S14F0)

S14,F1 GetAttr Request (GAR)

S14,F2 GetAttr Data (GAD)

S14,F3 SetAttr Request (SAR)

S14,F4 SetAttr Data (SAD)

S14,F5 GetType Request (GTR)

S14,F6 GetType Data (GTD)

S14,F7 GetAttrName Request (GANR)

S14,F8 GetAttrName Data (GAND)

S14,F9 Create Object Request (COR)

S14,F10 Create Object Acknowledge (CAO)

S14,F11 Delete Object Request

S14,F12 Delete Object Acknowledge (DOA)

S14,F13 Object Attach Request (OAR)

S14,F14 Object Attach Acknowledge (OAA)

S14,F15 Attached Object Action Request

(AOAR)

S14,F16 Attached Object Action Acknowledge

AOAA)

S14,F17 Supervised Object Action Request

SOAR)

S14,F18 Supervised Object Action

Acknowledge (SOAA)

S14,F19 Generic Service Request (GSR)

S14,F20 Generic Service Acknowledge (GSA)

S14,F21 Generic Service Completion

Information (GSCI)

S14,F22 Generic Service Completion

Acknowledge (GSCA)

S14,F23 Multi-block Generic Service Data

Inquire (GSDI)

S14,F24 Multi-block Generic Service Data

Grant (GSDG)

S14,F25 Get Service Name Request (GSNR)

S14,F26 Get Service Name Data (GSND)

S14,F27 Get Service Parameter Name Request

(GPNR)

S14,F28 Get Service Parameter Name Request

(GPND)

7.19 Stream 15 Recipe Management

S15,F0 Abort Transaction (S15F0)

S15,F1 Recipe Management Multi-block

Inquire

S15,F2 Recipe Management Multi-block

Grant

S15,F3 Recipe Namespace Action Request

S15,F4 Recipe Namespace Action

Acknowledge

S15,F5 Recipe Namespace Rename Request

S15,F6 Recipe Namespace Rename

Acknowledge

S15,F7 Recipe Space Request

S15,F8 Recipe Space Data

S15,F9 Recipe Status Request

S15,F10 Recipe Status Data

S15,F11 Recipe Version Request

S15,F12 Recipe Version Data

S15,F13 Recipe Create Request

S15,F14 Recipe Create Acknowledge

S15,F15 Recipe Store Request

S15,F16 Recipe Store Acknowledge

S15,F17 Recipe Retrieve Request

S15,F18 Recipe Retrieve Data

S15,F19 Recipe Rename Request

S15,F20 Recipe Rename Acknowledge

S15,F21 Recipe Action Request

S15,F22 Recipe Action Acknowledge

S15,F23 Recipe Descriptor Request

S15,F24 Recipe Descriptor Data

S15,F25 Recipe Parameter Update Request

S15,F26 Recipe Parameter Update

Acknowledge

S15,F27 Recipe Download Request

S15,F28 Recipe Download Acknowledge

S15,F29 Recipe Verify Request

S15,F30 Recipe Verify Acknowledge

S15,F31 Recipe Unload Request

S15,F32 Recipe Unload Data

S15,F33 Recipe Select Request

S15,F34 Recipe Select Acknowledge

S15,F35 Recipe Delete Request

S15,F36 Recipe Delete Acknowledge

S15,F37 DRNS Segment Approve Action

Request

S15,F38 DRNS Segment Approve Action

Acknowledge

S15,F39 DRNS Recorder Segment Request

S15,F40 DRNS Recorder Segment

Acknowledge

S15,F41 DRNS Recorder Modify Request

S15,F42 DRNS Recorder Modify Acknowledge

S15,F43 DRNS Get Change Request

S15,F44 DRNS Get Change Request Data

S15,F45 DRNS Manager Segment Change

Approval Request

S15,F46 DRNS Manager Segment Approval

Acknowledge

S15,F47 DRNS Manager Rebuild Request

S15,F48 DRNS Manager Rebuild Acknowledge

7.20 Stream 16 Processing Management

S16,F0 Abort Transaction (S16F0)

S16,F1 Multi-block Process Job Data Inquire

(PRJI)

S16,F2 Multi-block Process Job Data Grant

(PRJG)

S16,F3 Process Job Create Request (PRJCR)

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